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@article{, author = {Michelle Mueller and Verena Maiwald and Lothar Thiele and Jan Beutel and Cosmin Roman and Christofer Hierold}, title = {Two-level bulk microfabrication of a mechanical broadband vibration amplitude-amplier with ten coupled resonators}, journal = {Journal of Micromechanics and Microengineering}, number = {28}, month = {Feb}, year = {2018} }